Efficiency of MEMS Inertial Sensors Used in Low-dynamics Application
نویسندگان
چکیده
منابع مشابه
Testing of MEMS based Inertial Sensors
New technologies based on micro-technology, so called MEMS (Micro ElectroMechanical Systems), have been enabling many new products over the last ten years such as inkjet printers, displays or pressure sensors. Focusing on measurement of motion, MEMS inertial sensors such as accelerometers and gyroscopes, open new application fi elds for three big branches: Testing of MEMS based Inertial Sensors...
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The high aspect-ratio combined polyand single-crystal silicon micromachining technology (HARPSS) and its application to fabrication of precision MEMS inertial sensors are presented. HARPSS is a single wafer, all silicon, front-side release process which is capable of producing 10–100’s of microns thick, electrically isolated, 3-D polyand single-crystalline silicon microstructures with various s...
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Design of springs is a very important step in the design process of inertial sensors. A procedure for computing the spring stiffness for any single-chain configuration of beams and a translator which converts beam-based schematic representation of inertial sensors to higher-level behavioral representation are implemented. Combining the spring stiffness computation with the translator, spring-ma...
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Inertial navigation systems are used in many situations where the use of an external reference to measure position is impractical or unreliable. Typical inertial navigation systems used in aeronautics and marine applications are highly advanced pieces of equipment costing thousands of dollars. However, inexpensive accelerometers and angular rate sensors (gyros) can be used to make a far less ac...
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Global Navigation Satellite Systems (GNSS), such as the Global Positioning System (GPS), have been widely utilized and their applications are becoming popular, not only in military or commercial applications, but also for everyday life. Although GPS measurements are the essential information for currently developed land vehicle navigation systems (LVNS), GPS signals are often unavailable or unr...
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ژورنال
عنوان ژورنال: TransNav, the International Journal on Marine Navigation and Safety of Sea Transportation
سال: 2017
ISSN: 2083-6473
DOI: 10.12716/1001.11.02.02